Technique for profiling /sup 1/H with 2. 5-MeV Van de Graaff accelerators

Journal Article · Fri Jun 01 00:00:00 EDT 1979 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.90654· OSTI ID:6336427

Doyle, B L; Peercy, P S

We describe an elastic recoil detection (ERD) analysis technique for profiling /sup 1/H in the near-surface regions of solids using a 2.5-MeV Van de Graaff accelerator commonly used for ion-backscattering analysis. Energy analysis of /sup 1/H forward scattered by 2.4-MeV /sup 4/He incident on the target tilted at an angle of approx.75/sup 0/ yields a depth resolution of < or approx. =700 A and a sensitivity of better than 0.1 at.% for /sup 1/H to depths of < or approx. =0.6 ..mu..m in solids.

• Research Organization: Sandia Laboratories, Albuquerque, New Mexico 87185
• OSTI ID: 6336427
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 34:11; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
430000* -- Particle Accelerators
ACCELERATORS
BACKSCATTERING
BEAM PROFILES
BEAMS
CATIONS
CHARGED PARTICLES
DEPTH
DIMENSIONS
ELASTIC SCATTERING
ELECTROSTATIC ACCELERATORS
ENERGY SPECTRA
HYDROGEN 1
HYDROGEN IONS
HYDROGEN IONS 1 PLUS
HYDROGEN ISOTOPES
ION BEAMS
ION IMPLANTATION
IONS
ISOTOPES
LIGHT NUCLEI
NUCLEI
ODD-EVEN NUCLEI
QUANTITY RATIO
RECOILS
SCATTERING
SENSITIVITY
SOLIDS
SPECTRA
STABLE ISOTOPES
SURFACES
TARGETS
VAN DE GRAAFF ACCELERATORS