Ion beam analysis for depth profiling

Conference · Mon Nov 11 04:00:00 EST 1991 · Journal of Vacuum Science and Technology A

DOI:https://doi.org/10.1116/1.577959· OSTI ID:5989898

Knapp, J. A. ^[1]; Barbour, J. C. ^[1]; Doyle, B. L. ^[1]

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1. Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

New techniques in the application of ion beam analysis to depth profiling in solids are briefly surveyed. These include (1) non-Rutherford backscattering analysis using high energy beams, (2) resonant nuclear reaction analysis, (3) time-of-flight elastic recoil detection spectrometry, and (4) heavy ion backscattering spectrometry. The last can be used for very precise depth profiling in one configuration, or as a very sensitive trace contaminant analysis in another configuration.

• Research Organization: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 5989898
• Report Number(s): SAND--91-1109C; CONF-911132--6; ON: DE92003624
• Conference Information: Journal Name: Journal of Vacuum Science and Technology A Journal Issue: 4 Journal Volume: 10
• Country of Publication: United States
• Language: English

Related Subjects

665300* -- Interactions Between Beams & Condensed Matter-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BACKSCATTERING
BEAMS
CHEMICAL ANALYSIS
CROSS SECTIONS
ELASTIC SCATTERING
ENERGY DEPENDENCE
ION BEAMS
ION SCATTERING ANALYSIS
MEASURING METHODS
NONDESTRUCTIVE ANALYSIS
NUCLEAR REACTIONS
RUTHERFORD SCATTERING
SCATTERING
SOLIDS
SPECTROSCOPY
SURFACES