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Plasma non-uniformities induced by dissimilar electrode.

Journal Article · · Proposed for publication in the Journal of Applied Physics.
OSTI ID:970701

Nonuniformities in both sheath electric field and plasma excitation were observed around dissimilar metals placed on a rf electrode. Spatial maps of the rf sheath electric field obtained by laser-induced fluorescence-dip (LIF-dip) spectroscopy show that the sheath structure was a function of the electrode metal. In addition to the electric-field measurements, LIF, optical emission, and Langmuir probe measurements show nonuniform excitation around the dissimilar metals. The degree and spatial extent of the discharge nonuniformities were dependent on discharge conditions and the history of the metal surfaces.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
970701
Report Number(s):
SAND2005-3589J
Journal Information:
Proposed for publication in the Journal of Applied Physics., Journal Name: Proposed for publication in the Journal of Applied Physics.
Country of Publication:
United States
Language:
English

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