Radio frequency sheath formation and excitation around a stepped electrode

Journal Article · Mon Mar 14 23:00:00 EST 2005 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.1846939· OSTI ID:20668239

Barnat, E V; Hebner, G A ^[1]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185-1423 (United States)

Plasma and sheath structure around a rf excited stepped electrode is investigated. Laser-induced fluorescence dip spectroscopy is used to spatially resolve sheath fields in an argon discharge while optical emission and laser-induced fluorescence are used to measure the spatial structure of the surrounding discharge for various discharge conditions and step-junction configurations. The presence of the step perturbs the spatial structure of the fields around the step as well as the excitation in the region above the step.

• OSTI ID: 20668239
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 6 Vol. 97; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
ELECTRODES
EXCITATION
FLUORESCENCE
HIGH-FREQUENCY DISCHARGES
LASERS
PLASMA
PLASMA DENSITY
PLASMA SHEATH
RADIOWAVE RADIATION
SPECTROSCOPY
STAINLESS STEELS