Plasma nonuniformities induced by dissimilar electrode metals

Journal Article · Fri Jul 01 00:00:00 EDT 2005 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.1941481· OSTI ID:20713945

Barnat, E V; Hebner, G A ^[1]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185-1423 (United States)

Nonuniformities in both sheath electric field and plasma excitation were observed around dissimilar metals placed on a rf electrode. Spatial maps of the rf sheath electric field obtained by laser-induced fluorescence-dip (LIF-dip) spectroscopy show that the sheath structure was a function of the electrode metal. In addition to the electric-field measurements, LIF, optical emission, and Langmuir probe measurements show nonuniform excitation around the dissimilar metals. The degree and spatial extent of the discharge nonuniformities were dependent on discharge conditions and the history of the metal surfaces.

• OSTI ID: 20713945
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 1 Vol. 98; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ELECTRIC FIELDS
ELECTRODES
EXCITATION
FLUORESCENCE
HIGH-FREQUENCY DISCHARGES
LANGMUIR PROBE
LASERS
PLASMA
PLASMA SHEATH
SPECTROSCOPY
WALL EFFECTS