Growth of (103) fiber-textured SrBi{sub 2}Nb{sub 2}O{sub 9} films on Pt-coated silicon.
(103) fiber-textured SrBi{sub 2}Nb{sub 2}O{sub 9} thin films have been grown on Pt-coated Si substrates using a SrRuO{sub 3} buffer layer. High-resolution transmission electron microscopy reveals that the fiber texture arises from the local epitaxial growth of (111) SrRuO{sub 3} grains on (111) Pt grains and in turn (103) SrBi{sub 2}Nb{sub 2}O{sub 9} grains on (111) SrRuO{sub 3} grains. The films exhibit remanent polarization values of 9 {mu}C/cm2. The uniform grain orientation (fiber texture) should minimize grain-to-grain variations in the remanent polarization, which is important to continued scaling of ferroelectric memory device structures.
- Research Organization:
- Argonne National Laboratory (ANL)
- Sponsoring Organization:
- SC; NSF
- DOE Contract Number:
- AC02-06CH11357
- OSTI ID:
- 949434
- Report Number(s):
- ANL/MSD/JA-40901
- Journal Information:
- Appl. Phys. Lett., Journal Name: Appl. Phys. Lett. Journal Issue: 13 ; Apr. 1, 2002 Vol. 80; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- ENGLISH
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