The electrical contact resistance and adhesion of intermixed metal thin-films for use in MEMS contact switches.
Conference
·
OSTI ID:948993
No abstract prepared.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 948993
- Report Number(s):
- SAND2005-1995C; TRN: US200907%%264
- Resource Relation:
- Conference: Proposed for presentation at the 2005 Spring MRS Meeting held March 28-April 1, 2005 in San Francisco, CA.
- Country of Publication:
- United States
- Language:
- English
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