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U.S. Department of Energy
Office of Scientific and Technical Information

The electrical contact resistance and adhesion of intermixed metal thin-films for use in MEMS contact switches.

Conference ·
OSTI ID:948993

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
948993
Report Number(s):
SAND2005-1995C
Country of Publication:
United States
Language:
English