Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Percolation Threshold Effects on the Electrical Contact Resistance and Adhesion of Microelectromechanical Systems Thin-Film Materials.

Conference ·
OSTI ID:1264645

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1264645
Report Number(s):
SAND2006-6290C; 524998
Country of Publication:
United States
Language:
English

Related Subjects