Three dimensional silicon photonic crystals fabricated by two photon phase mask lithography.
Journal Article
·
· Proposed for publication in Applied Physics Letters.
OSTI ID:948684
- University of Illinois, Urbana-Champaign, Illinois
We describe the fabrication of silicon three dimensional photonic crystals using polymer templates defined by a single step, two-photon exposure through a layer of photopolymer with relief molded on its surface. The resulting crystals exhibit high structural quality over large areas, displaying geometries consistent with calculation. Spectroscopic measurements of transmission and reflection through the silicon and polymer structures reveal excellent optical properties, approaching properties predicted by simulations that assume ideal layouts.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 948684
- Report Number(s):
- SAND2008-5595J; TRN: US0901703
- Journal Information:
- Proposed for publication in Applied Physics Letters., Journal Name: Proposed for publication in Applied Physics Letters.
- Country of Publication:
- United States
- Language:
- English
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