Dual exposure, two-photon, conformal phase mask lithography for three dimensional silicon inverse woodpile photonic crystals

Shir, Daniel J.; Nelson, Erik C.; Chanda, Debashis; Brzezinski, Andrew; Braun, Paul V.; Rogers, John A.

doi:10.1116/1.3456181

Dual exposure, two-photon, conformal phase mask lithography for three dimensional silicon inverse woodpile photonic crystals

Journal Article · Wed Jul 07 00:00:00 EDT 2010 · Journal of Vacuum Science and Technology B

DOI:https://doi.org/10.1116/1.3456181· OSTI ID:1875137

Shir, Daniel J. ^[1]; Nelson, Erik C. ^[2]; Chanda, Debashis ^[2]; Brzezinski, Andrew ^[2]; Braun, Paul V. ^[2]; Rogers, John A. ^[2]

Univ. of Illinois at Urbana-Champaign, IL (United States); Univ. of California, Santa Barbara, CA (United States); University of Illinois
Univ. of Illinois at Urbana-Champaign, IL (United States); Univ. of California, Santa Barbara, CA (United States)

The authors describe the fabrication and characterization of three dimensional silicon inverse woodpile photonic crystals. Here, a dual exposure, two-photon, conformal phasemask technique is used to create high quality polymer woodpile structures over large areas with geometries that quantitatively match expectations based on optical simulations. Depositing silicon into these templates followed by the removal of the polymer results in silicon inverse woodpile photonic crystals for which calculations indicate a wide, complete photonic bandgap over a range of structural fill fractions. Spectroscopic measurements of normal incidence reflection from both the polymer and silicon photonic crystals reveal good optical properties.

View Accepted Manuscript (DOE)

Research Organization:: Univ. of Illinois at Urbana-Champaign, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division

Grant/Contract Number:: FG02-07ER46453; FG02-07ER46471; SC0001293

OSTI ID:: 1875137

Alternate ID(s):: OSTI ID: 1380396

Journal Information:: Journal of Vacuum Science and Technology B, Journal Name: Journal of Vacuum Science and Technology B Journal Issue: 4 Vol. 28; ISSN 2166-2746

Publisher:: American Vacuum Society / AIPCopyright Statement

Country of Publication:: United States

Language:: English

References (26)

Sub-Micrometer Scale Periodic Porous Cellular Structures: Microframes Prepared by Holographic Interference Lithography Maldovan, M.; Ullal, C. K.; Jang, J. -H. Advanced Materials, Vol. 19, Issue 22 https://doi.org/10.1002/adma.200700811	journal	November 2007
Fabrication of Three-Dimensional Photonic Crystals Using Multibeam Interference Lithography and Electrodeposition Miyake, Masao; Chen, Ying-Chieh; Braun, Paul V. Advanced Materials, Vol. 21, Issue 29 https://doi.org/10.1002/adma.200802085	journal	August 2009
Surface Modification of Sylgard-184 Poly(dimethyl siloxane) Networks by Ultraviolet and Ultraviolet/Ozone Treatment Efimenko, Kirill; Wallace, William E.; Genzer, Jan Journal of Colloid and Interface Science, Vol. 254, Issue 2, p. 306-315 https://doi.org/10.1006/jcis.2002.8594	journal	October 2002
Photonic band gaps in three dimensions: New layer-by-layer periodic structures Ho, K. M.; Chan, C. T.; Soukoulis, C. M. Solid State Communications, Vol. 89, Issue 5 https://doi.org/10.1016/0038-1098(94)90202-X	journal	February 1994
Three-Dimensional Nanofabrication with Elastomeric Phase Masks Shir, Daniel J.; Jeon, Seokwoo; Liao, Hongwei The Journal of Physical Chemistry B, Vol. 111, Issue 45 https://doi.org/10.1021/jp074093j	journal	October 2007
Three-Dimensional Nanostructures Formed by Single Step, Two-Photon Exposures through Elastomeric Penrose Quasicrystal Phase Masks Shir, Daniel; Liao, Hongwei; Jeon, Seokwoo Nano Letters, Vol. 8, Issue 8 https://doi.org/10.1021/nl080841k	journal	July 2008
Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication Cumpston, Brian H.; Ananthavel, Sundaravel P.; Barlow, Stephen Nature, Vol. 398, Issue 6722, p. 51-54 https://doi.org/10.1038/17989	journal	March 1999
Fabrication of photonic crystals for the visible spectrum by holographic lithography Campbell, M.; Sharp, D. N.; Harrison, M. T. Nature, Vol. 404, Issue 6773, p. 53-56 https://doi.org/10.1038/35003523	journal	March 2000
Large-scale synthesis of a silicon photonic crystal with a complete three-dimensional bandgap near 1.5 micrometres Blanco, Alvaro; Chomski, Emmanuel; Grabtchak, Serguei Nature, Vol. 405, Issue 6785 https://doi.org/10.1038/35013024	journal	May 2000
Photonic crystals: putting a new twist on light Joannopoulos, J. D.; Villeneuve, Pierre R.; Fan, Shanhui Nature, Vol. 386, Issue 6621 https://doi.org/10.1038/386143a0	journal	March 1997
Microperiodic structures: Direct writing of three-dimensional webs Gratson, Gregory M.; Xu, Mingjie; Lewis, Jennifer A. Nature, Vol. 428, Issue 6981 https://doi.org/10.1038/428386a	journal	March 2004
Complex three-dimensional conformal surfaces formed by atomic layer deposition: computation and experimental verification Brzezinski, Andrew; Chen, Ying-Chieh; Wiltzius, Pierre Journal of Materials Chemistry, Vol. 19, Issue 48 https://doi.org/10.1039/b914318a	journal	January 2009
Photonic crystal with diamondlike structure fabricated by holographic lithography Zhong, Y. C.; Zhu, S. A.; Su, H. M. Applied Physics Letters, Vol. 87, Issue 6 https://doi.org/10.1063/1.2008357	journal	August 2005
Holographically fabricated photonic crystals with large reflectance Chen, Y. C.; Geddes, J. B.; Lee, J. T. Applied Physics Letters, Vol. 91, Issue 24 https://doi.org/10.1063/1.2820449	journal	December 2007
Three dimensional silicon-air photonic crystals with controlled defects using interference lithography Ramanan, V.; Nelson, E.; Brzezinski, A. Applied Physics Letters, Vol. 92, Issue 17 https://doi.org/10.1063/1.2919523	journal	April 2008
Three dimensional silicon photonic crystals fabricated by two photon phase mask lithography Shir, D.; Nelson, E. C.; Chen, Y. C. Applied Physics Letters, Vol. 94, Issue 1 https://doi.org/10.1063/1.3036955	journal	January 2009
The influence of fabrication deviations on the photonic band gap of three-dimensional inverse woodpile nanostructures Woldering, Léon A.; Mosk, Allard P.; Tjerkstra, R. Willem Journal of Applied Physics, Vol. 105, Issue 9 https://doi.org/10.1063/1.3103777	journal	May 2009
Novel applications of photonic band gap materials: Low‐loss bends and high Q cavities Meade, Robert D.; Devenyi, A.; Joannopoulos, J. D. Journal of Applied Physics, Vol. 75, Issue 9 https://doi.org/10.1063/1.355934	journal	May 1994
Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks Jeon, S.; Park, J.-U.; Cirelli, R. Proceedings of the National Academy of Sciences, Vol. 101, Issue 34, p. 12428-12433 https://doi.org/10.1073/pnas.0403048101	journal	August 2004
Inhibited Spontaneous Emission in Solid-State Physics and Electronics Yablonovitch, Eli Physical Review Letters, Vol. 58, Issue 20, p. 2059-2062 https://doi.org/10.1103/PhysRevLett.58.2059	journal	May 1987
Numerical band calculation of holographically formed periodic structures with irregular motif Chanda, Debashis; Abolghasemi, Ladan; Herman, Peter R. Integrated Optoelectronic Devices 2006, SPIE Proceedings https://doi.org/10.1117/12.648519	conference	March 2006
Fabricating three-dimensional nanostructures using two photon lithography in a single exposure step Jeon, Seokwoo; Malyarchuk, Viktor; Rogers, John A. Optics Express, Vol. 14, Issue 6 https://doi.org/10.1364/OE.14.002300	journal	January 2006
Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography Moon, Jun Hyuk; Yang, Shu; Dong, Wenting Optics Express, Vol. 14, Issue 13 https://doi.org/10.1364/OE.14.006297	journal	January 2006
One-dimensional diffractive optical element based fabrication and spectral characterization of three-dimensional photonic crystal templates Chanda, Debashis; Abolghasemi, Ladan; Herman, Peter R. Optics Express, Vol. 14, Issue 19 https://doi.org/10.1364/OE.14.008568	journal	January 2006
Molded transparent photopolymers and phase shift optics for fabricating three dimensional nanostructures Jeon, Seokwoo; Shir, Daniel J.; Nam, Yun Suk Optics Express, Vol. 15, Issue 10 https://doi.org/10.1364/OE.15.006358	journal	January 2007
Multi-level diffractive optics for single laser exposure fabrication of telecom-band diamond-like 3-dimensional photonic crystals Chanda, Debashis; Abolghasemi, Ladan E.; Haque, Moez Optics Express, Vol. 16, Issue 20 https://doi.org/10.1364/OE.16.015402	journal	January 2008

Cited By (6)

Fabrication of Nanoshell-Based 3D Periodic Structures by Templating Process using Solution-derived ZnO Araki, Shinji; Ishikawa, Yasuaki; Wang, Xudongfang Nanoscale Research Letters, Vol. 12, Issue 1 https://doi.org/10.1186/s11671-017-2186-6	journal	June 2017
Rapid and Large‐Scale Fabrication of Full Color Woodpile Photonic Crystals via Interference from a Conformal Multilevel Phase Mask Nam, Sang‐Hyeon; Park, Junyong; Jeon, Seokwoo Advanced Functional Materials, Vol. 29, Issue 44 https://doi.org/10.1002/adfm.201904971	journal	August 2019
Conformable Solid-Index Phase Masks Composed of High-Aspect-Ratio Micropillar Arrays and Their Application to 3D Nanopatterning Park, Junyong; Park, Jae Hong; Kim, Eunhye Advanced Materials, Vol. 23, Issue 7 https://doi.org/10.1002/adma.201003885	journal	January 2011
25th Anniversary Article: Ordered Polymer Structures for the Engineering of Photons and Phonons Lee, Jae-Hwang; Koh, Cheong Yang; Singer, Jonathan P. Advanced Materials, Vol. 26, Issue 4 https://doi.org/10.1002/adma.201303456	journal	December 2013
Three-dimensional micro/nanoscale architectures: fabrication and applications Xu, Quan; Lv, Yunzu; Dong, Chenbo Nanoscale, Vol. 7, Issue 25 https://doi.org/10.1039/c5nr02048d	journal	January 2015
Ultrafast laser processing of materials: a review Phillips, Katherine C.; Gandhi, Hemi H.; Mazur, Eric Advances in Optics and Photonics, Vol. 7, Issue 4 https://doi.org/10.1364/aop.7.000684	journal	January 2015

Similar Records

Three dimensional silicon photonic crystals fabricated by two photon phase mask lithography.

Journal Article · Fri Aug 01 00:00:00 EDT 2008 · Proposed for publication in Applied Physics Letters. · OSTI ID:948684

Three dimensional silicon photonic crystals fabricated by two photon phase mask lithography

Journal Article · Sun Jan 04 19:00:00 EST 2009 · Applied Physics Letters · OSTI ID:1876443

Semicrystalline woodpile photonic crystals without complicated alignment via soft lithography

Journal Article · Thu May 13 00:00:00 EDT 2010 · Applied Physics Letters · OSTI ID:986310

Related Subjects

42 ENGINEERING
Atomic layer deposition
Chemical elements
Chemical vapor deposition
Etching
Finite difference methods
Optical properties
Photonic crystals
Polymers]
Scanning electron microscopy
Two-photon processes

Dual exposure, two-photon, conformal phase mask lithography for three dimensional silicon inverse woodpile photonic crystals

Citation Formats

References (26)

Cited By (6)

Similar Records

Related Subjects