Three dimensional silicon photonic crystals fabricated by two photon phase mask lithography

Shir, D.; Nelson, E. C.; Chen, Y. C.; Brzezinski, A.; Liao, H.; Braun, P. V.; Wiltzius, P.; Bogart, K. A.; Rogers, J. A.

doi:10.1063/1.3036955

Three dimensional silicon photonic crystals fabricated by two photon phase mask lithography

Journal Article · Mon Jan 05 00:00:00 EST 2009 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3036955· OSTI ID:1876443

Shir, D. ^[1]; Nelson, E. C. ^[2]; Chen, Y. C. ^[2]; Brzezinski, A. ^[2]; Liao, H. ^[2]; Braun, P. V. ^[2]; Wiltzius, P. ^[2]; Bogart, K. A. ^[3]; Rogers, J. A. ^[2]

Univ. of Illinois at Urbana-Champaign, IL (United States); University of Illinois
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

We describe the fabrication of silicon three dimensional photonic crystals using polymer templates defined by a single step, two-photon exposure through a layer of photopolymer with relief molded on its surface. Here, the resulting crystals exhibit high structural quality over large areas, displaying geometries consistent with calculation. Spectroscopic measurements of transmission and reflection through the silicon and polymer structures reveal excellent optical properties, approaching properties predicted by simulations that assume ideal layouts.

View Accepted Manuscript (DOE)

Research Organization:: Univ. of Illinois at Urbana-Champaign, IL (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA); USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division

Grant/Contract Number:: AC04-94AL85000; FG02-07ER46471

OSTI ID:: 1876443

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 1 Vol. 94; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

References (18)

Infiltration and Inversion of Holographically Defined Polymer Photonic Crystal Templates by Atomic Layer Deposition King, J. S.; Graugnard, E.; Roche, O. M. Advanced Materials, Vol. 18, Issue 12 https://doi.org/10.1002/adma.200502287	journal	June 2006
Sub-Micrometer Scale Periodic Porous Cellular Structures: Microframes Prepared by Holographic Interference Lithography Maldovan, M.; Ullal, C. K.; Jang, J. -H. Advanced Materials, Vol. 19, Issue 22 https://doi.org/10.1002/adma.200700811	journal	November 2007
Three-Dimensional Nanofabrication with Elastomeric Phase Masks Shir, Daniel J.; Jeon, Seokwoo; Liao, Hongwei The Journal of Physical Chemistry B, Vol. 111, Issue 45 https://doi.org/10.1021/jp074093j	journal	October 2007
Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication Cumpston, Brian H.; Ananthavel, Sundaravel P.; Barlow, Stephen Nature, Vol. 398, Issue 6722, p. 51-54 https://doi.org/10.1038/17989	journal	March 1999
Fabrication of photonic crystals for the visible spectrum by holographic lithography Campbell, M.; Sharp, D. N.; Harrison, M. T. Nature, Vol. 404, Issue 6773, p. 53-56 https://doi.org/10.1038/35003523	journal	March 2000
Large-scale synthesis of a silicon photonic crystal with a complete three-dimensional bandgap near 1.5 micrometres Blanco, Alvaro; Chomski, Emmanuel; Grabtchak, Serguei Nature, Vol. 405, Issue 6785 https://doi.org/10.1038/35013024	journal	May 2000
Microperiodic structures: Direct writing of three-dimensional webs Gratson, Gregory M.; Xu, Mingjie; Lewis, Jennifer A. Nature, Vol. 428, Issue 6981 https://doi.org/10.1038/428386a	journal	March 2004
Photonic crystal with diamondlike structure fabricated by holographic lithography Zhong, Y. C.; Zhu, S. A.; Su, H. M. Applied Physics Letters, Vol. 87, Issue 6 https://doi.org/10.1063/1.2008357	journal	August 2005
Holographic three-dimensional polymeric photonic crystals operating in the 1550nm window Chen, Jiaqi; Jiang, Wei; Chen, Xiaonan Applied Physics Letters, Vol. 90, Issue 9 https://doi.org/10.1063/1.2709641	journal	February 2007
Holographically fabricated photonic crystals with large reflectance Chen, Y. C.; Geddes, J. B.; Lee, J. T. Applied Physics Letters, Vol. 91, Issue 24 https://doi.org/10.1063/1.2820449	journal	December 2007
Three dimensional silicon-air photonic crystals with controlled defects using interference lithography Ramanan, V.; Nelson, E.; Brzezinski, A. Applied Physics Letters, Vol. 92, Issue 17 https://doi.org/10.1063/1.2919523	journal	April 2008
Novel applications of photonic band gap materials: Low‐loss bends and high Q cavities Meade, Robert D.; Devenyi, A.; Joannopoulos, J. D. Journal of Applied Physics, Vol. 75, Issue 9 https://doi.org/10.1063/1.355934	journal	May 1994
Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks Jeon, S.; Park, J.-U.; Cirelli, R. Proceedings of the National Academy of Sciences, Vol. 101, Issue 34, p. 12428-12433 https://doi.org/10.1073/pnas.0403048101	journal	August 2004
Inhibited Spontaneous Emission in Solid-State Physics and Electronics Yablonovitch, Eli Physical Review Letters, Vol. 58, Issue 20, p. 2059-2062 https://doi.org/10.1103/PhysRevLett.58.2059	journal	May 1987
Fabricating three-dimensional nanostructures using two photon lithography in a single exposure step Jeon, Seokwoo; Malyarchuk, Viktor; Rogers, John A. Optics Express, Vol. 14, Issue 6 https://doi.org/10.1364/OE.14.002300	journal	January 2006
Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography Moon, Jun Hyuk; Yang, Shu; Dong, Wenting Optics Express, Vol. 14, Issue 13 https://doi.org/10.1364/OE.14.006297	journal	January 2006
One-dimensional diffractive optical element based fabrication and spectral characterization of three-dimensional photonic crystal templates Chanda, Debashis; Abolghasemi, Ladan; Herman, Peter R. Optics Express, Vol. 14, Issue 19 https://doi.org/10.1364/OE.14.008568	journal	January 2006
Molded transparent photopolymers and phase shift optics for fabricating three dimensional nanostructures Jeon, Seokwoo; Shir, Daniel J.; Nam, Yun Suk Optics Express, Vol. 15, Issue 10 https://doi.org/10.1364/OE.15.006358	journal	January 2007

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36 MATERIALS SCIENCE
Chemical elements
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Finite difference methods
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Photonic systems
Polymers
Rigorous coupled-wave analysis

Three dimensional silicon photonic crystals fabricated by two photon phase mask lithography

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