Characterization of a surface micromachined pressure sensor array
Conference
·
OSTI ID:94596
- New Mexico Univ., Albuquerque, NM (United States). Center for High Technology Materials
- Sandia National Labs., Albuquerque, NM (United States)
A surface micromachined pressure sensor array has been designed and fabricated. The sensors are based upon deformable, silicon nitride diaphragms with polysilicon piezoresistors. Absolute pressure is detected by virtue of reference pressure cavities underneath the diaphragms. For this type of sensor, design tradeoffs must be made among allowable diaphragm size, and desirable pressure ranges. Several fabrication issues were observed and addressed. Offset voltage, sensitivity, and nonlinearity of 100 {mu}m diameter sensors were measured.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 94596
- Report Number(s):
- SAND--95-1783C; CONF-9510205--3; ON: DE95016764
- Country of Publication:
- United States
- Language:
- English
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