A CMOS-compatible, surface-micromachined pressure sensor for aqueous ultrasonic application

Conference · Sat Dec 31 04:00:00 EST 1994

OSTI ID:34467

Eaton, W P ^[1]; Smith, J H ^[2]

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1. New Mexico, Albuquerque, NM (United States)
2. Sandia National Labs., Albuquerque, NM (United States)

A surface micromachined pressure sensor array is under development at the Integrated Micromechanics, Microsensors, and CMOS Technologies organization at Sandia National Laboratories. This array is designed to sense absolute pressures from ambient pressure to 650 psia with frequency responses from DC to 2 MHz. The sensor is based upon a sealed, deformable, circular LPCVD silicon nitride diaphragm. Absolute pressure is determined from diaphragm deflection, which is sensed with low-stress, micromechanical, LPCVD polysilicon piezoresistors. All materials and processes used for sensor fabrication are CMOS compatible, and are part of Sandia`s ongoing effort of CMOS integration with Micro-ElectroMechanical Systems (MEMS). Test results of individual sensors are presented along with process issues involving the release etch and metal step coverage.

• Research Organization: Sandia National Labs., Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States); American Society of Mechanical Engineers, New York, NY (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 34467
• Report Number(s): SAND--94-2146C; CONF-950228--2; ON: DE95008538
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
DESIGN
MEMBRANES
MICROELECTRONIC CIRCUITS
MOS TRANSISTORS
PIEZOELECTRICITY
PRESSURE GAGES
SILICON NITRIDES