Surface structure of tetrahedral-coordinated amorphous diamond-like carbon films grown by pulsed laser deposition
Conference
·
OSTI ID:94011
- Drexel Univ., Philadelphia, PA (United States). Dept. of Physics and Atmospheric Science
- Pennsylvania Univ., Philadelphia, PA (United States)
- Sandia National Labs., Albuquerque, NM (United States)
The structure and composition of tetrahedral-coordinated amorphous diamond-like carbon films (a-tC) grown by pulsed laser deposition (PLD) of graphite has been studied with atomic force microscopy (AFM). The nanometer-scale surface structure has been studied as a function of growth parameters (e.g., laser energy density and film thickness) using contact-mode and tapping-mode AFM. Although the surfaces were found to be generally smooth, they exhibited reproducible structural features on several size scales which correlate with the variation of laser energy and th excited ion etching.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States); National Science Foundation, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 94011
- Report Number(s):
- SAND--94-2003C; CONF-941144--166; ON: DE95014854; CNN: DMR93-13047; DMR91-20668
- Country of Publication:
- United States
- Language:
- English
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