Pulsed laser deposition of amorphous diamond-like carbon films with ArF (193 nm) excimer laser
- Department of Materials Science and Engineering and Materials Research Center, Northwestern University, 2225 Sheridan Road, Evanston, Illinois 60208 (United States)
We have deposited hydrogen-free diamond-like amorphous carbon films by ArF (193 nm) pulsed laser ablation of graphite. The deposition process is performed with a laser power density of only 5[times]10[sup 8] W/cm[sup 2] at a temperature without any auxiliary energy source incorporation. The resulting films possess remarkable physical, optical, and mechanical properties which are close to those of diamond and distinct from the graphite target used. The films have a mechanical hardness up to 38 GPa, an optical energy band gap of 2.6 eV, and excellent thermal stability. Analysis of electron energy loss spectroscopy reveals the domination of diamond-type tetrahedral bonding structure in the films with the [ital sp][sup 3] bond fraction over 95%. Compared with other reported results of pulsed-laser- deposited diamond-like carbon films, our experimental results confirm that the laser wavelength or photon energy plays a crucial role in controlling the properties of the pulsed-laser- deposited diamond-like carbon films.
- DOE Contract Number:
- FG02-87ER45314
- OSTI ID:
- 6147106
- Journal Information:
- Journal of Materials Research; (United States), Journal Name: Journal of Materials Research; (United States) Vol. 8:9; ISSN JMREEE; ISSN 0884-2914
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360601* -- Other Materials-- Preparation & Manufacture
ABLATION
AMORPHOUS STATE
CARBON
DEPOSITION
DIAMONDS
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
ELEMENTAL MINERALS
ELEMENTS
ENERGY GAP
ENERGY-LOSS SPECTROSCOPY
FILMS
GRAPHITE
HARDNESS
LASER RADIATION
MECHANICAL PROPERTIES
MINERALS
NONMETALS
PULSES
RADIATIONS
SPECTROSCOPY
STABILITY