Amorphous diamond-like carbon film growth by KrF- and ArF- excimer laser PLD: Correlation with plume properties
- Institute of Spectroscopy, Troitsk (Russian Federation)
- Oak Ridge National Lab., TN (United States); and others
A comparative study of ArF- and KrF-laser deposition of amorphous diamond-like carbon (DLC) films and relevant carbon plasmas has been performed. Spectroscopic ellipsometry and EELS analysis of the DLC films deposited on Si <100> and NaCl substrates were utilized to characterize the high quality ArF- and KrF-laser deposited films (up to 84% of sp{sup 3} bonded carbon in 7 J/cm{sup 2} -ArF-laser DLC film). Gated ICCD imaging, luminescence and ion current probe diagnostics of the carbon plume have revealed quite different properties of carbon plasmas generated by ArF- and KrF- lasers. KrF-laser (6.7 J/cm{sup 2}) irradiation produces a less energetic carbon plasma containing larger amounts of C{sub 2} and probably larger clusters compared with ArF-laser irradiation at the same energy fluence. We conclude that the more energetic and highly-atomized ArF-laser carbon plasma results in the better diamond-like properties.
- Research Organization:
- Oak Ridge National Lab., TN (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 83103
- Report Number(s):
- CONF-950412--21; ON: DE95013987
- Country of Publication:
- United States
- Language:
- English
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