Temperature Influence on the Production of Nanodot Patters by Ion Beam Sputtering of Si(001)
Journal Article
·
· Physical Review B
- Universidad Autonoma de Madrid, Madrid
- Instituto de Ciencia de Materiales de Madrid (ICMM)
- Centre de Spectrometric Nucleaire et de Spectrometric de Masse, FRANCE
- ORNL
- Universidad Carlos III, Madrid, Spain
- European Synchrotron Radiation Facility (ESRF)
The temperature influence
- Research Organization:
- Oak Ridge National Laboratory (ORNL)
- Sponsoring Organization:
- SC USDOE - Office of Science (SC)
- DOE Contract Number:
- AC05-00OR22725
- OSTI ID:
- 931327
- Journal Information:
- Physical Review B, Journal Name: Physical Review B Journal Issue: 15 Vol. 73
- Country of Publication:
- United States
- Language:
- English
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