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Advanced surface polishing using gas cluster ion beams.

Journal Article · · Nucl. Instrum. Methods Phys. Res. B

No abstract prepared.

Research Organization:
Argonne National Laboratory (ANL)
Sponsoring Organization:
SC; Epion Corp.
DOE Contract Number:
AC02-06CH11357
OSTI ID:
928922
Report Number(s):
ANL/MCS/JA-59052
Journal Information:
Nucl. Instrum. Methods Phys. Res. B, Journal Name: Nucl. Instrum. Methods Phys. Res. B Journal Issue: 1-2 ; Aug. 2007 Vol. 261; ISSN 0168-583X; ISSN NIMBEU
Country of Publication:
United States
Language:
ENGLISH

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