Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

LIGA microsystems : surface interactions, tribology and coatings.

Journal Article · · Proposed for publication in Journal of Manufacturing Processes.
OSTI ID:924254
; ;
Abstract Not Provided
Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
924254
Report Number(s):
SAND2003-1830J
Journal Information:
Proposed for publication in Journal of Manufacturing Processes., Journal Name: Proposed for publication in Journal of Manufacturing Processes.
Country of Publication:
United States
Language:
English

Similar Records

Application of Diamond-Like Nanocomposite Coatings on LIGA Microsystem Parts.
Journal Article · Mon Dec 31 23:00:00 EST 2007 · Journal of Microelectromechanical Systems · OSTI ID:1146004
Tribological and Electrical Behavior of Coatings for Microsystems.
Conference · Sun Apr 01 00:00:00 EDT 2007 · OSTI ID:1148047
Tribology in Microsystems.
Conference · Wed Feb 29 23:00:00 EST 2012 · OSTI ID:1068459

Related Subjects