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U.S. Department of Energy
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Tribological and Electrical Behavior of Coatings for Microsystems.

Conference ·
OSTI ID:1148047
Abstract not provided.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1148047
Report Number(s):
SAND2007-2521C; 523147
Country of Publication:
United States
Language:
English

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