Application of Diamond-Like Nanocomposite Coatings on LIGA Microsystem Parts.
Journal Article
·
· Journal of Microelectromechanical Systems
OSTI ID:1146004
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- DE-AC04-94AL85000
- OSTI ID:
- 1146004
- Report Number(s):
- SAND2008-0052J; 519811
- Journal Information:
- Journal of Microelectromechanical Systems, Related Information: Proposed for publication in Journal of Microelectromechanical Systems.
- Country of Publication:
- United States
- Language:
- English
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