Reliability of Diamond-like Nanocomposite Coatings for LIGA-based MEMS.
Conference
·
OSTI ID:1122141
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- DE-AC04-94AL85000
- OSTI ID:
- 1122141
- Report Number(s):
- SAND2005-3858C; 504937
- Resource Relation:
- Conference: 2005 MRS Fall Meeting held November 28-December 2, 2005 in Boston, MA.; Related Information: Proposed for presentation at the 2005 MRS Fall Meeting held November 28-December 2, 2005 in Boston, MA.
- Country of Publication:
- United States
- Language:
- English
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