Tribology of Diamond-like Nanocomposite Coatings for Ni-based MEMS: Contact Stress - Deformation Relationships Under Sliding Probes.

Conference · Tue Nov 01 00:00:00 EST 2005

OSTI ID:1465842

Jungk, John M; Michael, Joseph R.; Prasad, Somuri V.

Abstract not provided.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1465842
• Report Number(s): SAND2005-7473C; 526248
• Resource Relation: Conference: Proposed for presentation at the MRS Annual Fall Meeting held November 28 - December 2, 2005 in Boston, MA.
• Country of Publication: United States
• Language: English