Breakdown of the high-voltage sheath in metal plasma immersion ionimplantation.
Journal Article
·
· Applied Physics Letters
OSTI ID:893732
No abstract prepared.
- Research Organization:
- Ernest Orlando Lawrence Berkeley NationalLaboratory, Berkeley, CA (US)
- Sponsoring Organization:
- USDOE Director, Office of Science
- DOE Contract Number:
- AC02-05CH11231
- OSTI ID:
- 893732
- Report Number(s):
- LBNL--44002
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 1 Vol. 76; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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