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Pure high dose metal ion implantation using the plasma immersion technique

Journal Article · Mon Aug 16 04:00:00 EDT 1999 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.1150094· OSTI ID:765476

Zhang, T ^[1]; Tang, B Y; Zeng, Z M; Kwok, T K; Chu, P K; Monteiro, O R; Brown, I G

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Research Organization:: Lawrence Berkeley National Lab., CA (US)

Sponsoring Organization:: USDOE Director, Office of Science (US)

DOE Contract Number:: AC03-76SF00098

OSTI ID:: 765476

Report Number(s):: LBNL--45401

Journal Information:: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 11 Vol. 70; ISSN 0034-6748; ISSN RSINAK

Country of Publication:: United States

Language:: English

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Related Subjects

36 MATERIALS SCIENCE
DOSES
ION IMPLANTATION
METALS
RADIATION EFFECTS