Skip to main content

Plasma drift and non-uniformity effects in plasma immersion ion implantation

Journal Article · Tue Apr 11 04:00:00 EDT 2000 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.126559· OSTI ID:843041

Keidar, M ^[1]; Monteiro, O R; Brown, I G

LBNL Library

No abstract prepared.

Print

Research Organization:: Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)

Sponsoring Organization:: USDOE Director. Office of Energy Research; Fulbright and the Welch Fellowship Programs

DOE Contract Number:: AC03-76SF00098

OSTI ID:: 843041

Report Number(s):: LBNL--45457

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 21 Vol. 76; ISSN APPLAB; ISSN 0003-6951

Country of Publication:: United States

Language:: English

Similar Records

Plasma drift and non-uniformity effects in plasma immersion ion-implantation

Conference · Thu Jul 01 00:00:00 EDT 1999 · OSTI ID:20067624

Sheath expansion in a drifting non-uniform plasma

Journal Article · Thu Oct 01 00:00:00 EDT 1998 · Journal of Vacuum Science and Technology B · OSTI ID:776549

Magnetic field effect on the sheath thickness in plasma immersion ion implantation

Journal Article · Wed Aug 07 00:00:00 EDT 2002 · Applied Physics Letters · OSTI ID:801983

Related Subjects

36 MATERIALS SCIENCE
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ION IMPLANTATION
PLASMA
PLASMA DRIFT