Effect of irradiation temperature on dynamic recovery in gallium nitride
Journal Article
·
· Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
A single crystal gallium nitride film on sapphire was successively irradiated to a fluence of 4.5 Au3+/nm2 in different areas at varied temperatures ranging from 150 to 800 K. The temperature dependence of disorder on both the Ga and N sublattices has been investigated using a 3.736 MeV He+ backscattering analysis along the <0001>- and <10-11>-axial channeling directions. Significant dynamic recovery of disorder occurs over the applied temperature range. There is a higher degree of disorder on the N sublattice observed along the <10-11> axis. Some of the defects produced during the irradiation in GaN are effectively shielded by the <0001> axis.
- Research Organization:
- Pacific Northwest National Laboratory (PNNL), Richland, WA (US), Environmental Molecular Sciences Laboratory (EMSL)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC05-76RL01830
- OSTI ID:
- 877569
- Report Number(s):
- PNNL-SA-42525; 3448; KC0201020
- Journal Information:
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms, Journal Name: Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms Journal Issue: 1-2 Vol. 242
- Country of Publication:
- United States
- Language:
- English
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