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Effect of irradiation temperature on dynamic recovery in gallium nitride

Journal Article · · Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms

A single crystal gallium nitride film on sapphire was successively irradiated to a fluence of 4.5 Au3+/nm2 in different areas at varied temperatures ranging from 150 to 800 K. The temperature dependence of disorder on both the Ga and N sublattices has been investigated using a 3.736 MeV He+ backscattering analysis along the <0001>- and <10-11>-axial channeling directions. Significant dynamic recovery of disorder occurs over the applied temperature range. There is a higher degree of disorder on the N sublattice observed along the <10-11> axis. Some of the defects produced during the irradiation in GaN are effectively shielded by the <0001> axis.

Research Organization:
Pacific Northwest National Laboratory (PNNL), Richland, WA (US), Environmental Molecular Sciences Laboratory (EMSL)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-76RL01830
OSTI ID:
877569
Report Number(s):
PNNL-SA-42525; 3448; KC0201020
Journal Information:
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms, Journal Name: Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms Journal Issue: 1-2 Vol. 242
Country of Publication:
United States
Language:
English

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