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Microelectromechanical dual-mass resonator structure

Patent ·
OSTI ID:874455
 [1];  [2];  [3]
  1. Cedar Crest, NM
  2. Albuquerque, NM
  3. Bountiful, UT
+ Show Author Affiliations

A dual-mass microelectromechanical (MEM) resonator structure is disclosed in which a first mass is suspended above a substrate and driven to move along a linear or curved path by a parallel-plate electrostatic actuator. A second mass, which is also suspended and coupled to the first mass by a plurality of springs is driven by motion of the first mass. Various modes of operation of the MEM structure are possible, including resonant and antiresonant modes, and a contacting mode. In each mode of operation, the motion induced in the second mass can be in the range of several microns up to more than 50 .mu.m while the first mass has a much smaller displacement on the order of one micron or less. The MEM structure has applications for forming microsensors that detect strain, acceleration, rotation or movement.

Research Organization:
SANDIA CORP
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
US 6393913
OSTI ID:
874455
Country of Publication:
United States
Language:
English

References (6)

Parallel-plate electrostatic dual-mass resonator conference August 1999
Microelectromechanical filters for signal processing journal September 1998
Reflexions on the future of microsystems journal January 1999
New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes journal April 1998
Thermal base drive for micromechanical resonators employing deep-diffusion bases journal June 1993
Operational characteristics of electrostatically driven torsional resonator with two degrees of freedom journal January 1998

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Related Subjects

/73/333/
50
acceleration
actuator
antiresonant
applications
contacting
coupled
curved
detect
disclosed
displacement
driven
dual-mass
electrostatic
forming
including
induced
linear
mass
microelectromechanical
micron
microns
microsensors
mode
modes
motion
move
movement
mum
operation
parallel-plate
path
plurality
range
resonant
resonator
resonator structure
rotation
springs
strain
structure
substrate
suspended