Microelectromechanical dual-mass resonator structure

Patent · Tue Jan 01 00:00:00 EST 2002

OSTI ID:874455

Dyck, Christopher W ^[1]; Allen, James J ^[2]; Huber, Robert J ^[3]

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1. Cedar Crest, NM
2. Albuquerque, NM
3. Bountiful, UT

A dual-mass microelectromechanical (MEM) resonator structure is disclosed in which a first mass is suspended above a substrate and driven to move along a linear or curved path by a parallel-plate electrostatic actuator. A second mass, which is also suspended and coupled to the first mass by a plurality of springs is driven by motion of the first mass. Various modes of operation of the MEM structure are possible, including resonant and antiresonant modes, and a contacting mode. In each mode of operation, the motion induced in the second mass can be in the range of several microns up to more than 50 .mu.m while the first mass has a much smaller displacement on the order of one micron or less. The MEM structure has applications for forming microsensors that detect strain, acceleration, rotation or movement.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6393913
• OSTI ID: 874455
• Country of Publication: United States
• Language: English

Related Subjects

microelectromechanical
dual-mass
resonator
structure
disclosed
mass
suspended
substrate
driven
move
linear
curved
path
parallel-plate
electrostatic
actuator
coupled
plurality
springs
motion
modes
operation
including
resonant
antiresonant
contacting
mode
induced
range
microns
50
mum
displacement
micron
applications
forming
microsensors
detect
strain
acceleration
rotation
movement
resonator structure
/73/333/