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Compliant displacement-multiplying apparatus for microelectromechanical systems

Patent ·
OSTI ID:873499
 [1];  [2];  [3]
  1. 9391 Quail Ridge Run, Brighton, MI 48114
  2. 12216 Papaya Ct., NE., Albuquerque, NM 87111
  3. 818 S. Gammon, Apartment 4, Madison, WI 53719
+ Show Author Affiliations

A pivotless compliant structure is disclosed that can be used to increase the geometric advantage or mechanical advantage of a microelectromechanical (MEM) actuator such as an electrostatic comb actuator, a capacitive-plate electrostatic actuator, or a thermal actuator. The compliant structure, based on a combination of interconnected flexible beams and cross-beams formed of one or more layers of polysilicon or silicon nitride, can provide a geometric advantage of from about 5:1 to about 60:1 to multiply a 0.25-3 .mu.m displacement provided by a short-stroke actuator so that such an actuator can be used to generate a displacement stroke of about 10-34 .mu.m to operate a ratchet-driven MEM device or a microengine. The compliant structure has less play than conventional displacement-multiplying devices based on lever arms and pivoting joints, and is expected to be more reliable than such devices. The compliant structure and an associated electrostatic or thermal actuator can be formed on a common substrate (e.g. silicon) using surface micromachining.

Research Organization:
SANDIA CORP
DOE Contract Number:
AC04-94AL85000
Assignee:
Kota, Sridhar (9391 Quail Ridge Run, Brighton, MI 48114);Rodgers, M. Steven (12216 Papaya Ct., NE., Albuquerque, NM 87111);Hetrick, Joel A. (818 S. Gammon, Apartment 4, Madison, WI 53719)
Patent Number(s):
US 6175170
OSTI ID:
873499
Country of Publication:
United States
Language:
English

References (4)

Topological Synthesis of Compliant Mechanisms Using Multi-Criteria Optimization journal June 1997
A Methodical Approach to the Design of Compliant Micromechanisms conference June 1994
Size and Shape Optimization of Compliant Mechanisms: An Efficiency Formulation conference February 2021
The Role of Compliance in the Design of MEMS
  • Ananthasuresh, G. K.; Kota, Sridhar
  • ASME 1996 Design Engineering Technical Conferences and Computers in Engineering Conference, Volume 1: Design for Manufacturing Conference https://doi.org/10.1115/96-DETC/DFM-1309
conference February 2021

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Related Subjects

/310/
10-34
25-3
60
actuator
advantage
apparatus
arms
associated
based
beams
capacitive-plate
comb
comb actuator
combination
common
common substrate
compliant
conventional
cross-beams
device
devices
disclosed
displacement
displacement-multiplying
electrostatic
electrostatic comb
expected
flexible
flexible beam
formed
generate
geometric
increase
interconnected
joints
layers
lever
lever arm
mechanical
mechanical advantage
mechanical systems
microelectromechanical
microengine
micromachining
multiply
nitride
operate
pivoting
pivoting joint
pivotless
play
polysilicon
provide
provided
ratchet-driven
reliable
short-stroke
silicon
silicon nitride
stroke
structure
substrate
surface
surface micromachining
systems
thermal
thermal actuator