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Title: Compliant displacement-multiplying apparatus for microelectromechanical systems

Patent ·
OSTI ID:873499
 [1];  [2];  [3]
  1. 9391 Quail Ridge Run, Brighton, MI 48114
  2. 12216 Papaya Ct., NE., Albuquerque, NM 87111
  3. 818 S. Gammon, Apartment 4, Madison, WI 53719
+ Show Author Affiliations

A pivotless compliant structure is disclosed that can be used to increase the geometric advantage or mechanical advantage of a microelectromechanical (MEM) actuator such as an electrostatic comb actuator, a capacitive-plate electrostatic actuator, or a thermal actuator. The compliant structure, based on a combination of interconnected flexible beams and cross-beams formed of one or more layers of polysilicon or silicon nitride, can provide a geometric advantage of from about 5:1 to about 60:1 to multiply a 0.25-3 .mu.m displacement provided by a short-stroke actuator so that such an actuator can be used to generate a displacement stroke of about 10-34 .mu.m to operate a ratchet-driven MEM device or a microengine. The compliant structure has less play than conventional displacement-multiplying devices based on lever arms and pivoting joints, and is expected to be more reliable than such devices. The compliant structure and an associated electrostatic or thermal actuator can be formed on a common substrate (e.g. silicon) using surface micromachining.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
DOE Contract Number:
AC04-94AL85000
Assignee:
Kota, Sridhar (9391 Quail Ridge Run, Brighton, MI 48114);Rodgers, M. Steven (12216 Papaya Ct., NE., Albuquerque, NM 87111);Hetrick, Joel A. (818 S. Gammon, Apartment 4, Madison, WI 53719)
Patent Number(s):
US 6175170
OSTI ID:
873499
Country of Publication:
United States
Language:
English

References (4)

Size and Shape Optimization of Compliant Mechanisms: An Efficiency Formulation conference February 2021
Topological Synthesis of Compliant Mechanisms Using Multi-Criteria Optimization journal June 1997
A Methodical Approach to the Design of Compliant Micromechanisms conference June 1994
The Role of Compliance in the Design of MEMS
  • Ananthasuresh, G. K.; Kota, Sridhar
  • ASME 1996 Design Engineering Technical Conferences and Computers in Engineering Conference, Volume 1: Design for Manufacturing Conference https://doi.org/10.1115/96-DETC/DFM-1309
conference February 2021

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Related Subjects

compliant
displacement-multiplying
apparatus
microelectromechanical
systems
pivotless
structure
disclosed
increase
geometric
advantage
mechanical
actuator
electrostatic
comb
capacitive-plate
thermal
based
combination
interconnected
flexible
beams
cross-beams
formed
layers
polysilicon
silicon
nitride
provide
60
multiply
25-3
displacement
provided
short-stroke
generate
stroke
10-34
operate
ratchet-driven
device
microengine
play
conventional
devices
lever
arms
pivoting
joints
expected
reliable
associated
common
substrate
surface
micromachining
mechanical advantage
common substrate
electrostatic comb
silicon nitride
surface micromachining
thermal actuator
flexible beam
comb actuator
mechanical systems
pivoting joint
lever arm
/310/