Method of fabricating a 3-dimensional tool master

Patent · Mon Dec 31 23:00:00 EST 2001

OSTI ID:874250

Bonivert, William D ^[1]; Hachman, John T ^[2]

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1. Pleasanton, CA
2. Stockton, CA

The invention is a method for the fabrication of an imprint tool master. The process begins with a metallic substrate. A layer of photoresist is placed onto the metallic substrate and a image pattern mask is then aligned to the mask. The mask pattern has opaque portions that block exposure light and "open" or transparent portions which transmit exposure light. The photoresist layer is then exposed to light transmitted through the "open" portions of the first image pattern mask and the mask is then removed. A second layer of photoresist then can be placed onto the first photoresist layer and a second image pattern mask may be placed on the second layer of photoresist. The second layer of photoresist is exposed to light, as before, and the second mask removed. The photoresist layers are developed simultaneously to produce a multi-level master mandrel upon which a conductive film is formed. A tool master can now be formed onto the conductive film. An imprint tool is then produced from the tool master. In one embodiment, nickel is electroplated onto the tool master to produce a three-dimensional imprint tool.

• Research Organization: SANDIA CORP
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Coroporation (Livermore, CA)
• Patent Number(s): US 6350360
• OSTI ID: 874250
• Country of Publication: United States
• Language: English

Related Subjects

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3-dimensional
aligned
begins
block
conductive
developed
electroplated
embodiment
exposed
exposure
fabricating
fabrication
film
formed
image
imprint
layer
layers
light
light transmitted
mandrel
mask
master
metallic
metallic substrate
method
multi-level
nickel
opaque
pattern
photoresist
placed
portions
process
produce
produced
removed
simultaneously
substrate
three-dimensional
tool
transmit
transmitted
transparent