Surface-micromachined chain for use in microelectromechanical structures

Patent · Sun Dec 31 23:00:00 EST 2000

OSTI ID:874158

A surface-micromachined chain and a microelectromechanical (MEM) structure incorporating such a chain are disclosed. The surface-micromachined chain can be fabricated in place on a substrate (e.g. a silicon substrate) by depositing and patterning a plurality of alternating layers of a chain-forming material (e.g. polycrystalline silicon) and a sacrificial material (e.g. silicon dioxide or a silicate glass). The sacrificial material is then removed by etching to release the chain for movement. The chain has applications for forming various types of MEM devices which include a microengine (e.g. an electrostatic motor) connected to rotate a drive sprocket, with the surface-micromachined chain being connected between the drive sprocket and one or more driven sprockets.

• Research Organization: SANDIA CORP
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6328903
• OSTI ID: 874158
• Country of Publication: United States
• Language: English

Related Subjects

/216/59/
alternating
applications
chain
chain-forming
connected
depositing
devices
dioxide
disclosed
drive
driven
electrostatic
etching
fabricated
forming
glass
incorporating
layers
material
mechanical structure
microelectromechanical
microengine
motor
movement
patterning
plurality
polycrystalline
release
removed
rotate
sacrificial
silicate
silicon
silicon substrate
sprocket
sprockets
structure
structures
substrate
surface-micromachined
types
various types