Microelectromechanical ratcheting apparatus

Patent · Sun Dec 31 23:00:00 EST 2000

OSTI ID:873650

Barnes, Stephen M ^[1]; Miller, Samuel L ^[1]; Jensen, Brian D ^[1]; Rodgers, M Steven ^[1]; Burg, Michael S ^[1]

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1. Albuquerque, NM

A microelectromechanical (MEM) ratcheting apparatus is disclosed which includes an electrostatic or thermal actuator that drives a moveable member in the form of a ring gear, stage, or rack. Motion is effected by one or more reciprocating pawls driven by the actuator in a direction that is parallel to, in line with, or tangential to the path. The reciprocating pawls engage indexing elements (e.g. teeth or pins) on the moveable member to incrementally move the member along a curved or straight path with the ability to precisely control and determine the position of the moveable member. The MEM apparatus can be formed on a silicon substrate by conventional surface micromachining methods.

• Research Organization: SANDIA CORP
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6211599
• OSTI ID: 873650
• Country of Publication: United States
• Language: English

Related Subjects

/310/74/
ability
actuator
apparatus
control
conventional
curved
determine
direction
disclosed
driven
drives
effected
electrostatic
elements
engage
form
formed
gear
incrementally
indexing
line
machining method
methods
microelectromechanical
micromachining
micromachining method
motion
move
moveable
parallel
path
pawls
pins
position
precisely
precisely control
rack
ratcheting
ratcheting apparatus
reciprocating
silicon
silicon substrate
stage
straight
substrate
surface
surface micromachining
tangential
teeth
thermal
thermal actuator