Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom

Christen, David K; He, Qing

Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom

Patent · Sun Dec 31 23:00:00 EST 2000

OSTI ID:874024

Christen, David K ^[1]; He, Qing ^[2]

Oak Ridge, TN
Bloomington, MN

The present invention provides a biaxially textured laminate article having a polycrystalline biaxially textured metallic substrate with an electrically conductive oxide layer epitaxially deposited thereon and methods for producing same. In one embodiment a biaxially texture Ni substrate has a layer of LaNiO.sub.3 deposited thereon. An initial layer of electrically conductive oxide buffer is epitaxially deposited using a sputtering technique using a sputtering gas which is an inert or forming gas. A subsequent layer of an electrically conductive oxide layer is then epitaxially deposited onto the initial layer using a sputtering gas comprising oxygen. The present invention will enable the formation of biaxially textured devices which include HTS wires and interconnects, large area or long length ferromagnetic and/or ferroelectric memory devices, large area or long length, flexible light emitting semiconductors, ferroelectric tapes, and electrodes.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN

DOE Contract Number:: AC05-96OR22464

Assignee:: UT-Battelle, LLC (Oak Ridge, TN)

Patent Number(s):: US 6296701

OSTI ID:: 874024

Country of Publication:: United States

Language:: English

References (23)

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Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom

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