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Highly charged ion secondary ion mass spectroscopy

Patent ·
OSTI ID:874007
 [1];  [2];  [1];  [1]
  1. Livermore, CA
  2. San Francisco, CA
+ Show Author Affiliations
A secondary ion mass spectrometer using slow, highly charged ions produced in an electron beam ion trap permits ultra-sensitive surface analysis and high spatial resolution simultaneously. The spectrometer comprises an ion source producing a primary ion beam of highly charged ions that are directed at a target surface, a mass analyzer, and a microchannel plate detector of secondary ions that are sputtered from the target surface after interaction with the primary beam. The unusually high secondary ion yield permits the use of coincidence counting, in which the secondary ion stops are detected in coincidence with a particular secondary ion. The association of specific molecular species can be correlated. The unique multiple secondary nature of the highly charged ion interaction enables this new analytical technique.
Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
DOE Contract Number:
W-7405-ENG-48
Assignee:
Regents of University of California (Oakland, CA)
Patent Number(s):
US 6291820
OSTI ID:
874007
Country of Publication:
United States
Language:
English

References (4)

The Electron‐Beam Ion Trap journal October 1994
Electronic Sputtering of Thin Conductors by Neutralization of Slow Highly Charged Ions journal March 1997
Emission of secondary particles from metals and insulators at impact of slow highly charged ions journal April 1997
Quantification of metal trace contaminants on Si wafer surfaces by Laser-SNMS and TOF-SIMS using sputter deposited submonolayer standards journal July 1996

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Related Subjects

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analysis
analytical
analytical technique
analyzer
association
beam
channel plate
charged
coincidence
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coincidence counting
comprises
correlated
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electron
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enables
highly
highly charged
interaction
mass
mass analyzer
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mass spectroscopy
microchannel
microchannel plate
molecular
molecular specie
molecular species
multiple
nature
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plate
primary
primary beam
produced
producing
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secondary
simultaneously
slow
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spatial
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species
specific
spectrometer
spectrometer comprises
spectroscopy
sputtered
stops
surface
surface analysis
target
target surface
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trap
ultra-sensitive
unique
unusually
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