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Title: Phase-shifting point diffraction interferometer phase grating designs

Abstract

Diffraction phase gratings are employed in phase-shifting point diffraction interferometers to improve the interferometric fringe contrast. The diffraction phase grating diffracts a zeroth-order diffraction of light at a first power level to the test-beam window of a mask that is positioned at the image plane and a first-order diffraction at a second power to the reference-beam pinhole. The diffraction phase grating is preferably selected to yield a desired ratio of the first power level to second power level.

Inventors:
 [1]
  1. Oakland, CA
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
OSTI Identifier:
873886
Patent Number(s):
US 6266147
Assignee:
Regents of University of California (Oakland, CA)
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
phase-shifting; diffraction; interferometer; phase; grating; designs; gratings; employed; interferometers; improve; interferometric; fringe; contrast; diffracts; zeroth-order; light; power; level; test-beam; window; mask; positioned; image; plane; first-order; reference-beam; pinhole; preferably; selected; yield; desired; ratio; image plane; diffraction interferometer; power level; beam window; phase grating; preferably selected; fringe contrast; desired ratio; diffraction phase; zeroth-order diffraction; grating designs; first-order diffraction; /356/

Citation Formats

Naulleau, Patrick. Phase-shifting point diffraction interferometer phase grating designs. United States: N. p., 2001. Web.
Naulleau, Patrick. Phase-shifting point diffraction interferometer phase grating designs. United States.
Naulleau, Patrick. 2001. "Phase-shifting point diffraction interferometer phase grating designs". United States. https://www.osti.gov/servlets/purl/873886.
@article{osti_873886,
title = {Phase-shifting point diffraction interferometer phase grating designs},
author = {Naulleau, Patrick},
abstractNote = {Diffraction phase gratings are employed in phase-shifting point diffraction interferometers to improve the interferometric fringe contrast. The diffraction phase grating diffracts a zeroth-order diffraction of light at a first power level to the test-beam window of a mask that is positioned at the image plane and a first-order diffraction at a second power to the reference-beam pinhole. The diffraction phase grating is preferably selected to yield a desired ratio of the first power level to second power level.},
doi = {},
url = {https://www.osti.gov/biblio/873886}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

Works referenced in this record:

Electron beam lithography digital pattern generator and electronics for generalized curvilinear structures
journal, November 1995


Electron beam lithography digital pattern generator and electronics for generalized curvilinear structures
journal, November 1995


Phase-shifting point diffraction interferometer
journal, January 1996


Phase-shifting point diffraction interferometer
journal, January 1996


Phase-measuring interferometry using extreme ultraviolet radiation
journal, November 1995


Effect of intensity error correlation on the computed phase of phase-shifting interferometry
journal, January 1990


Effect of intensity error correlation on the computed phase of phase-shifting interferometry
journal, January 1990


Characterization of the accuracy of EUV phase-shifting point diffraction interferometry
conference, June 1998

  • Naulleau, Patrick P.; Goldberg, Kenneth A.; Lee, Sang Hun
  • 23rd Annual International Symposium on Microlithography, SPIE Proceedings
  • https://doi.org/10.1117/12.309563

Characterization of the accuracy of EUV phase-shifting point diffraction interferometry
conference, June 1998

  • Naulleau, Patrick P.; Goldberg, Kenneth A.; Lee, Sang Hun
  • 23rd Annual International Symposium on Microlithography, SPIE Proceedings
  • https://doi.org/10.1117/12.309563