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Phase-shifting point diffraction interferometer phase grating designs

Patent ·
OSTI ID:873886
 [1]
  1. Oakland, CA
+ Show Author Affiliations
Diffraction phase gratings are employed in phase-shifting point diffraction interferometers to improve the interferometric fringe contrast. The diffraction phase grating diffracts a zeroth-order diffraction of light at a first power level to the test-beam window of a mask that is positioned at the image plane and a first-order diffraction at a second power to the reference-beam pinhole. The diffraction phase grating is preferably selected to yield a desired ratio of the first power level to second power level.
Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
DOE Contract Number:
AC03-76SF00098
Assignee:
Regents of University of California (Oakland, CA)
Patent Number(s):
US 6266147
OSTI ID:
873886
Country of Publication:
United States
Language:
English

References (5)

Phase-measuring interferometry using extreme ultraviolet radiation journal November 1995
Characterization of the accuracy of EUV phase-shifting point diffraction interferometry
  • Naulleau, Patrick P.; Goldberg, Kenneth A.; Lee, Sang Hun
  • 23rd Annual International Symposium on Microlithography, SPIE Proceedings https://doi.org/10.1117/12.309563
conference June 1998
Effect of intensity error correlation on the computed phase of phase-shifting interferometry journal January 1990
Electron beam lithography digital pattern generator and electronics for generalized curvilinear structures journal November 1995
Phase-shifting point diffraction interferometer journal January 1996

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beam window
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diffraction
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