Fabrication of an optical component

Patent · Fri Dec 31 23:00:00 EST 1999

OSTI ID:873134

Nichols, Michael A ^[1]; Aikens, David M ^[2]; Camp, David W ^[3]; Thomas, Ian M ^[1]; Kiikka, Craig ^[1]; Sheehan, Lynn M ^[1]; Kozlowski, Mark R ^[1]

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1. Livermore, CA
2. Pleasanton, CA
3. Oakland, CA

A method for forming optical parts used in laser optical systems such as high energy lasers, high average power lasers, semiconductor capital equipment and medical devices. The optical parts will not damage during the operation of high power lasers in the ultra-violet light range. A blank is first ground using a fixed abrasive grinding method to remove the subsurface damage formed during the fabrication of the blank. The next step grinds and polishes the edges and forms bevels to reduce the amount of fused-glass contaminants in the subsequent steps. A loose abrasive grind removes the subsurface damage formed during the fixed abrasive or "blanchard" removal process. After repolishing the bevels and performing an optional fluoride etch, the surface of the blank is polished using a zirconia slurry. Any subsurface damage formed during the loose abrasive grind will be removed during this zirconia polish. A post polish etch may be performed to remove any redeposited contaminants. Another method uses a ceria polishing step to remove the subsurface damage formed during the loose abrasive grind. However, any residual ceria may interfere with the optical properties of the finished part. Therefore, the ceria and other contaminants are removed by performing either a zirconia polish after the ceria polish or a post ceria polish etch.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA
• DOE Contract Number: W-7405-ENG-48
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 6099389
• OSTI ID: 873134
• Country of Publication: United States
• Language: English

Related Subjects

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abrasive
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abrasive grinding
amount
average
average power
bevels
blanchard
blank
capital
ceria
component
contaminants
damage
devices
edges
energy
energy laser
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equipment
etch
fabrication
finished
fixed
fluoride
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forming optic
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fused-glass
grind
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interfere
laser
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lasers
light
loose
medical
medical device
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method
operation
optical
optical component
optical properties
optical systems
optional
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performing
polish
polished
polishes
polishing
post
power
power laser
power lasers
process
properties
range
redeposited
reduce
removal
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remove
removed
removes
repolishing
residual
semiconductor
slurry
step
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subsequent
subsequent step
subsurface
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systems
ultra-violet
violet light
zirconia