Fabrication of an optical component

Patent · Sat Jan 01 00:00:00 EST 2000

OSTI ID:873134

Nichols, Michael A ^[1]; Aikens, David M ^[2]; Camp, David W ^[3]; Thomas, Ian M ^[1]; Kiikka, Craig ^[1]; Sheehan, Lynn M ^[1]; Kozlowski, Mark R ^[1]

---

1. Livermore, CA
2. Pleasanton, CA
3. Oakland, CA

A method for forming optical parts used in laser optical systems such as high energy lasers, high average power lasers, semiconductor capital equipment and medical devices. The optical parts will not damage during the operation of high power lasers in the ultra-violet light range. A blank is first ground using a fixed abrasive grinding method to remove the subsurface damage formed during the fabrication of the blank. The next step grinds and polishes the edges and forms bevels to reduce the amount of fused-glass contaminants in the subsequent steps. A loose abrasive grind removes the subsurface damage formed during the fixed abrasive or "blanchard" removal process. After repolishing the bevels and performing an optional fluoride etch, the surface of the blank is polished using a zirconia slurry. Any subsurface damage formed during the loose abrasive grind will be removed during this zirconia polish. A post polish etch may be performed to remove any redeposited contaminants. Another method uses a ceria polishing step to remove the subsurface damage formed during the loose abrasive grind. However, any residual ceria may interfere with the optical properties of the finished part. Therefore, the ceria and other contaminants are removed by performing either a zirconia polish after the ceria polish or a post ceria polish etch.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 6099389
• OSTI ID: 873134
• Country of Publication: United States
• Language: English

Related Subjects

fabrication
optical
component
method
forming
laser
systems
energy
lasers
average
power
semiconductor
capital
equipment
medical
devices
damage
operation
ultra-violet
light
range
blank
ground
fixed
abrasive
grinding
remove
subsurface
formed
step
grinds
polishes
edges
forms
bevels
reduce
amount
fused-glass
contaminants
subsequent
steps
loose
grind
removes
blanchard
removal
process
repolishing
performing
optional
fluoride
etch
surface
polished
zirconia
slurry
removed
polish
post
performed
redeposited
ceria
polishing
residual
interfere
properties
finished
power lasers
removal process
laser optical
optical systems
average power
power laser
optical properties
medical device
energy laser
medical devices
abrasive grind
abrasive grinding
subsequent step
optical component
energy lasers
forming optic
violet light
/451/