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Title: Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed

Abstract

A process for forming complex microelectromechanical (MEM) devices having five layers or levels of polysilicon, including four structural polysilicon layers wherein mechanical elements can be formed, and an underlying polysilicon layer forming a voltage reference plane. A particular type of MEM device that can be formed with the five-level polysilicon process is a MEM transmission for controlling or interlocking mechanical power transfer between an electrostatic motor and a self-assembling structure (e.g. a hinged pop-up mirror for use with an incident laser beam). The MEM transmission is based on an incomplete gear train and a bridging set of gears that can be moved into place to complete the gear train to enable power transfer. The MEM transmission has particular applications as a safety component for surety, and for this purpose can incorporate a pin-in-maze discriminator responsive to a coded input signal.

Inventors:
 [1];  [2];  [1];  [1]
  1. Albuquerque, NM
  2. Edgewood, NM
Publication Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
873064
Patent Number(s):
US 6082208
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; fabricating; five-level; microelectromechanical; structures; transmission; formed; process; forming; complex; devices; five; layers; levels; polysilicon; including; structural; mechanical; elements; underlying; layer; voltage; reference; plane; particular; type; device; controlling; interlocking; power; transfer; electrostatic; motor; self-assembling; structure; hinged; pop-up; mirror; incident; laser; beam; based; incomplete; gear; train; bridging; set; gears; moved; complete; enable; applications; safety; component; surety; purpose; incorporate; pin-in-maze; discriminator; responsive; coded; input; signal; reference plane; voltage reference; incident laser; particular application; silicon layer; laser beam; input signal; mechanical power; silicon layers; particular type; particular applications; mechanical structure; pin-in-maze discriminator; /74/310/

Citation Formats

Rodgers, M Steven, Sniegowski, Jeffry J, Miller, Samuel L, and McWhorter, Paul J. Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed. United States: N. p., 2000. Web.
Rodgers, M Steven, Sniegowski, Jeffry J, Miller, Samuel L, & McWhorter, Paul J. Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed. United States.
Rodgers, M Steven, Sniegowski, Jeffry J, Miller, Samuel L, and McWhorter, Paul J. Sat . "Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed". United States. https://www.osti.gov/servlets/purl/873064.
@article{osti_873064,
title = {Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed},
author = {Rodgers, M Steven and Sniegowski, Jeffry J and Miller, Samuel L and McWhorter, Paul J},
abstractNote = {A process for forming complex microelectromechanical (MEM) devices having five layers or levels of polysilicon, including four structural polysilicon layers wherein mechanical elements can be formed, and an underlying polysilicon layer forming a voltage reference plane. A particular type of MEM device that can be formed with the five-level polysilicon process is a MEM transmission for controlling or interlocking mechanical power transfer between an electrostatic motor and a self-assembling structure (e.g. a hinged pop-up mirror for use with an incident laser beam). The MEM transmission is based on an incomplete gear train and a bridging set of gears that can be moved into place to complete the gear train to enable power transfer. The MEM transmission has particular applications as a safety component for surety, and for this purpose can incorporate a pin-in-maze discriminator responsive to a coded input signal.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {1}
}

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