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Method of depositing multi-layer carbon-based coatings for field emission

Patent ·
OSTI ID:872437
 [1];  [1]
  1. Albuquerque, NM
+ Show Author Affiliations
A novel field emitter device for cold cathode field emission applications, comprising a multi-layer resistive carbon film. The multi-layered film of the present invention is comprised of at least two layers of a resistive carbon material, preferably amorphous-tetrahedrally coordinated carbon, such that the resistivities of adjacent layers differ. For electron emission from the surface, the preferred structure comprises a top layer having a lower resistivity than the bottom layer. For edge emitting structures, the preferred structure of the film comprises a plurality of carbon layers, wherein adjacent layers have different resistivities. Through selection of deposition conditions, including the energy of the depositing carbon species, the presence or absence of certain elements such as H, N, inert gases or boron, carbon layers having desired resistivities can be produced. Field emitters made according the present invention display improved electron emission characteristics in comparison to conventional field emitter materials.
Research Organization:
SANDIA CORP
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Livermore, CA)
Patent Number(s):
US 5935639
OSTI ID:
872437
Country of Publication:
United States
Language:
English

References (2)

Electron emission from chemical vapor deposited diamond and dielectric breakdown journal August 1994
Diamond‐like carbon films prepared with a laser ion source journal July 1988

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