Microlens frames for laser diode arrays
- Livermore, CA
Monolithic microlens frames enable the fabrication of monolithic laser diode arrays and are manufactured inexpensively with high registration, and with inherent focal length compensation for any lens diameter variation. A monolithic substrate is used to fabricate a low-cost microlens array. The substrate is wet-etched or sawed with a series of v-grooves. The v-grooves can be created by wet-etching, by exploiting the large etch-rate selectivity of different crystal planes. The v-grooves provide a support frame for either cylindrical or custom-shaped microlenses. Because the microlens frames are formed by photolithographic semiconductor batch-processing techniques, they can be formed inexpensively over large areas with precise lateral and vertical registration. The v-groove has an important advantage for preserving the correct focus for lenses of varying diameter.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Number(s):
- US 5923481
- OSTI ID:
- 872388
- Country of Publication:
- United States
- Language:
- English
Similar Records
Fabrication and evaluation of GaN negative and bifocal microlenses
Ruggedized microchannel-cooled laser diode array with self-aligned microlens
Related Subjects
advantage
array
arrays
batch-processing
compensation
correct
created
crystal
crystal plane
crystal planes
custom-shaped
cylindrical
diameter
diode
diode array
diode arrays
enable
etch-rate
exploiting
fabricate
fabrication
focal
focal length
focus
formed
frame
frames
inexpensively
inherent
laser
laser diode
lateral
length
lens
lens array
lens frame
lenses
low-cost
manufactured
microlens
microlens frames
microlenses
monolithic
monolithic laser
photolithographic
planes
precise
preserving
processing technique
processing techniques
provide
registration
sawed
selectivity
semiconductor
series
substrate
support
support frame
techniques
v-groove
v-grooves
variation
varying
vertical
wet-etched
wet-etching