Microlens frames for laser diode arrays
- Livermore, CA
Monolithic microlens frames enable the fabrication of monolithic laser diode arrays and are manufactured inexpensively with high registration, and with inherent focal length compensation for any lens diameter variation. A monolithic substrate is used to fabricate a low-cost microlens array. The substrate is wet-etched or sawed with a series of v-grooves. The v-grooves can be created by wet-etching, by exploiting the large etch-rate selectivity of different crystal planes. The v-grooves provide a support frame for either cylindrical or custom-shaped microlenses. Because the microlens frames are formed by photolithographic semiconductor batch-processing techniques, they can be formed inexpensively over large areas with precise lateral and vertical registration. The v-groove has an important advantage for preserving the correct focus for lenses of varying diameter.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Number(s):
- US 5923481
- OSTI ID:
- 872388
- Country of Publication:
- United States
- Language:
- English
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wet-etched
sawed
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created
wet-etching
exploiting
etch-rate
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crystal
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cylindrical
custom-shaped
microlenses
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semiconductor
batch-processing
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precise
lateral
vertical
v-groove
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diode arrays
crystal plane
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processing technique
lens array
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