Thin film hydrogen sensor

Patent · Thu Dec 31 23:00:00 EST 1998

OSTI ID:872216

Cheng, Yang-Tse ^[1]; Poli, Andrea A ^[2]; Meltser, Mark Alexander ^[3]

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1. Rochester Hills, MI
2. Livonia, MI
3. Pittsford, NY

A thin film hydrogen sensor, includes: a substantially flat ceramic substrate with first and second planar sides and a first substrate end opposite a second substrate end; a thin film temperature responsive resistor on the first planar side of the substrate proximate to the first substrate end; a thin film hydrogen responsive metal resistor on the first planar side of the substrate proximate to the fist substrate end and proximate to the temperature responsive resistor; and a heater on the second planar side of the substrate proximate to the first end.

• Research Organization: General Motors Corp
• DOE Contract Number: AC02-90CH10435
• Assignee: General Motors Corporation (Detroit, MI)
• Patent Number(s): US 5886614
• OSTI ID: 872216
• Country of Publication: United States
• Language: English

Related Subjects

/338/422/
ceramic
ceramic substrate
film
film hydrogen
film temperature
fist
flat
heater
hydrogen
hydrogen sensor
metal
opposite
planar
proximate
resistor
responsive
sensor
substantially
substantially flat
substrate
temperature
temperature responsive