Magnetic-cusp, cathodic-arc source
Patent
·
OSTI ID:870162
- Livermore, CA
A magnetic-cusp for a cathodic-arc source wherein the arc is confined to the desired cathode surface, provides a current path for electrons from the cathode to the anode, and utilizes electric and magnetic fields to guide ions from the cathode to a point of use, such as substrates to be coated. The magnetic-cusp insures arc stability by an easy magnetic path from anode to cathode, while the straight-through arrangement leads to high ion transmission.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Number(s):
- US 5468363
- OSTI ID:
- 870162
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
/204/250/313/315/
anode
arrangement
cathode
cathode surface
cathodic-arc
cathodic-arc source
coated
confined
current
current path
desired
easy
electric
electrons
fields
guide
insures
leads
magnetic
magnetic field
magnetic fields
magnetic path
magnetic-cusp
path
provides
source
stability
straight-through
substrates
surface
transmission
utilizes
utilizes electric
anode
arrangement
cathode
cathode surface
cathodic-arc
cathodic-arc source
coated
confined
current
current path
desired
easy
electric
electrons
fields
guide
insures
leads
magnetic
magnetic field
magnetic fields
magnetic path
magnetic-cusp
path
provides
source
stability
straight-through
substrates
surface
transmission
utilizes
utilizes electric