Magnetic-cusp, cathodic-arc source
Patent
·
OSTI ID:131941
A magnetic-cusp for a cathodic-arc source wherein the arc is confined to the desired cathode surface, provides a current path for electrons from the cathode to the anode, and utilizes electric and magnetic fields to guide ions from the cathode to a point of use, such as substrates to be coated. The magnetic-cusp insures arc stability by an easy magnetic path from anode to cathode, while the straight-through arrangement leads to high ion transmission. 3 figs.
- Research Organization:
- University of California
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Univ. of California, Oakland, CA (United States)
- Patent Number(s):
- US 5,468,363/A/
- Application Number:
- PAN: 8-232,661
- OSTI ID:
- 131941
- Country of Publication:
- United States
- Language:
- English
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