Magnetic-cusp, cathodic-arc source

Patent · Tue Nov 21 00:00:00 EST 1995

OSTI ID:131941

Falabella, S

A magnetic-cusp for a cathodic-arc source wherein the arc is confined to the desired cathode surface, provides a current path for electrons from the cathode to the anode, and utilizes electric and magnetic fields to guide ions from the cathode to a point of use, such as substrates to be coated. The magnetic-cusp insures arc stability by an easy magnetic path from anode to cathode, while the straight-through arrangement leads to high ion transmission. 3 figs.

• Research Organization: Univ. of California (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Univ. of California, Oakland, CA (United States)
• Patent Number(s): US 5,468,363/A/
• Application Number: PAN: 8-232,661
• OSTI ID: 131941
• Resource Relation: Other Information: PBD: 21 Nov 1995
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ION SOURCES
DESIGN
MATERIALS
ENERGY BEAM DEPOSITION
USES
CATHODES
ELECTRIC ARCS