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Surface property detection apparatus and method

Patent ·
OSTI ID:870017
 [1];  [2];  [3];  [1]
  1. Albuquerque, NM
  2. Evergreen, CO
  3. Placitas, NM
+ Show Author Affiliations

Apparatus and method for detecting, determining, and imaging surface resistance corrosion, thin film growth, and oxide formation on the surface of conductors or other electrical surface modification. The invention comprises a modified confocal resonator structure with the sample remote from the radiating mirror. Surface resistance is determined by analyzing and imaging reflected microwaves; imaging reveals anomalies due to surface impurities, non-stoichiometry, and the like, in the surface of the superconductor, conductor, dielectric, or semiconductor.

Research Organization:
AT & T CORP
DOE Contract Number:
AC04-76DP00789
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
US 5440238
OSTI ID:
870017
Country of Publication:
United States
Language:
English

References (8)

Microwave surface resistance of YBa 2 Cu 3 O 6.9 superconducting films journal May 1988
Infrared and Optical Masers journal December 1958
The effects of processing sequences on the microwave surface resistance of TlCaBaCuO journal June 1991
Hydrogen plasma treatment of silicon surfaces studied by in-situ spectroscopic ellipsometry journal December 1990
On the Focused Fabry-Perot Resonator in Plasma Diagnostics (Correspondence) journal September 1964
The role of low temperatures in the operation of logic circuitry journal January 1970
Confocal resonators for measuring the surface resistance of high‐temperature superconducting films journal June 1991
Morphology control and high critical currents in superconducting thin films in the Tl-Ca-Ba-Cu-O system journal August 1989

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Related Subjects

/324/117/118/
analyzing
anomalies
apparatus
comprises
conductor
conductors
confocal
confocal resonator
corrosion
detecting
detection
detection apparatus
determined
determining
dielectric
due
electrical
film
film growth
formation
growth
imaging
imaging surface
impurities
method
microwaves
mirror
modification
modified
non-stoichiometry
oxide
oxide form
property
radiating
reflected
reflected microwave
remote
resistance
resonator
resonator structure
reveals
sample
sample remote
semiconductor
structure
superconductor
surface
surface impurities
surface modification
surface resistance