Surface property detection apparatus and method

Patent · Tue Aug 08 00:00:00 EDT 1995

OSTI ID:101000

Martens, J S; Ginley, D S; Hietala, V M; Sorensen, N R

Apparatus and method for detecting, determining, and imaging surface resistance corrosion, thin film growth, and oxide formation on the surface of conductors or other electrical surface modification. The invention comprises a modified confocal resonator structure with the sample remote from the radiating mirror. Surface resistance is determined by analyzing and imaging reflected microwaves; imaging reveals anomalies due to surface impurities, non-stoichiometry, and the like, in the surface of the superconductor, conductor, dielectric, or semiconductor. 4 figs.

• Research Organization: AT&T Corporation
• DOE Contract Number: AC04-76DP00789
• Assignee: Sandia Corp., Albuquerque, NM (United States)
• Patent Number(s): US 5,440,238/A/
• Application Number: PAN: 7-948,535
• OSTI ID: 101000
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
CORROSION
CORROSION PRODUCTS
CRYSTAL GROWTH
DESIGN
DETECTION
DIELECTRIC MATERIALS
ELECTRIC CONDUCTIVITY
ELECTRIC CONDUCTORS
IMAGES
MEASURING INSTRUMENTS
MICROWAVE EQUIPMENT
NONDESTRUCTIVE TESTING
OXIDES
SEMICONDUCTOR MATERIALS
SUPERCONDUCTORS
SURFACE PROPERTIES