Surface property detection apparatus and method

Patent · Tue Aug 08 00:00:00 EDT 1995

OSTI ID:101000

Martens, J S; Ginley, D S; Hietala, V M; Sorensen, N R

Apparatus and method for detecting, determining, and imaging surface resistance corrosion, thin film growth, and oxide formation on the surface of conductors or other electrical surface modification. The invention comprises a modified confocal resonator structure with the sample remote from the radiating mirror. Surface resistance is determined by analyzing and imaging reflected microwaves; imaging reveals anomalies due to surface impurities, non-stoichiometry, and the like, in the surface of the superconductor, conductor, dielectric, or semiconductor. 4 figs.

• Research Organization: AT&T
• DOE Contract Number: AC04-76DP00789
• Assignee: Sandia Corp., Albuquerque, NM (United States)
• Patent Number(s): US 5,440,238/A/
• Application Number: PAN: 7-948,535
• OSTI ID: 101000
• Resource Relation: Other Information: PBD: 8 Aug 1995
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES
36 MATERIALS SCIENCE
SUPERCONDUCTORS
NONDESTRUCTIVE TESTING
ELECTRIC CONDUCTIVITY
CORROSION
ELECTRIC CONDUCTORS
DIELECTRIC MATERIALS
SEMICONDUCTOR MATERIALS
CRYSTAL GROWTH
OXIDES
CORROSION PRODUCTS
MICROWAVE EQUIPMENT
IMAGES
SURFACE PROPERTIES
DETECTION
MEASURING INSTRUMENTS
DESIGN