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.beta.-silicon carbide protective coating and method for fabricating same

Patent ·
OSTI ID:869587
 [1];  [2]
  1. Mountain View, CA
  2. Brentwood, CA
+ Show Author Affiliations

A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or .mu.c-SiC film on the surface and produce .beta.--SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface.

Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
DOE Contract Number:
W-7405-ENG-48
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Number(s):
US 5360491
OSTI ID:
869587
Country of Publication:
United States
Language:
English

References (1)

beta -SiC/Si heterojunction bipolar transistors with high current gain journal February 1988

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Related Subjects

--sic
-silicon
-silicon carbide
/136/204/257/427/438/
achieved
amorphous
amorphous silicon
anti-reflective
anti-reflective coating
application
beta
beta-silicon
c-sic
carbide
carbon
cell
cells
co-sputtering
coating
components
dc
dc magnet
dc magnetron
energy
energy source
excimer
excimer laser
extremely
fabricating
film
form
forming
hard
hard surface
irradiated
laser
magnetron
manufacturing
method
poly-
polycrystalline
primary
produce
protective
protective coating
protective surface
pulsed
pulsed energy
reflective coating
requirement
sic
silicon
silicon carbide
solar
solar cell
solar cells
source
surface
synthesize
top
wherever