[beta]-silicon carbide protective coating and method for fabricating same

Patent · Mon Oct 31 23:00:00 EST 1994

OSTI ID:6996690

Carey, P G; Thompson, J B

A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating are disclosed. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or [mu]c-SiC film on the surface and produce [beta]-SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface. 3 figs.

• DOE Contract Number: W-7405-ENG-48
• Assignee: Dept. of Energy, Washington, DC (United States)
• Patent Number(s): US 5360491; A
• Application Number: PPN: US 8-043809
• OSTI ID: 6996690
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501 -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
ANTIREFLECTION COATINGS
CARBIDES
CARBON COMPOUNDS
COATINGS
DEPOSITION
DIRECT ENERGY CONVERTERS
ELECTROMAGNETIC RADIATION
EQUIPMENT
LASER RADIATION
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PROTECTIVE COATINGS
RADIATIONS
SILICON CARBIDES
SILICON COMPOUNDS
SOLAR CELLS
SOLAR EQUIPMENT
SPUTTERING
SURFACE COATING