[beta]-silicon carbide protective coating and method for fabricating same
A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating are disclosed. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or [mu]c-SiC film on the surface and produce [beta]-SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface. 3 figs.
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- Patent Number(s):
- US 5360491; A
- Application Number:
- PPN: US 8-043809
- OSTI ID:
- 6996690
- Resource Relation:
- Patent File Date: 7 Apr 1993
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
SILICON CARBIDES
SURFACE COATING
SOLAR CELLS
ANTIREFLECTION COATINGS
PROTECTIVE COATINGS
LASER RADIATION
SPUTTERING
CARBIDES
CARBON COMPOUNDS
COATINGS
DEPOSITION
DIRECT ENERGY CONVERTERS
ELECTROMAGNETIC RADIATION
EQUIPMENT
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
RADIATIONS
SILICON COMPOUNDS
SOLAR EQUIPMENT
360601* - Other Materials- Preparation & Manufacture
140501 - Solar Energy Conversion- Photovoltaic Conversion